Category: Semiconductor
Semiconductor/IC
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KLA-Tencor’s New Reticle Inspector
Seems like no aspect of IC design and production escapes the need for All Things to Get Harder and Harder, requiring ever-better solutions. Today we…
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Mentor Unifies Verification
Seems like verification unification is in the air. We saw it recently with Synopsys, and now we have a move from Mentor. While Synopsys’ version…
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IC Compiler Reinvented
What if you could just… toss it all and start over? (OK, maybe all except the router?) If you’re Synopsys, you now know: you’d end…
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Moving Back to Software
We’ve seen it before: the debate between hardware and software for implementing electronic functions. An oft-cited approach is to keep as much as possible in…
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Metal Oxide Resists Lower Roughness
One of the huge challenges of advanced-node patterning is roughness. There are actually two flavors of this: line-edge roughness (LER) and line-width roughness (LWR). Almost…
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A Jump in EUV Resist Sensitivity
There was an interesting presentation that happened towards the end of SPIE Litho – it seemed to catch the audience off guard, and I frankly…
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EUV Blasts through 100 W
The EUV barrier has been broken. And I found out right on the heels of yesterday’s EUV update – but too late to get it…
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Cleaning Up the Verification Shop
It’s one thing if different tools from different divisions of the same company don’t talk seamlessly together. Generally considered poor form. While that used to…