SAN DIEGO, July 9, 2012—Cymer, Inc. (Nasdaq: CYMI), the world’s leading supplier of light sources used by chipmakers to pattern advanced semiconductor chips, today announced its SmartPulse™ data management tool for light source performance monitoring has been adopted by leading chipmakers, with installations at multiple chipmaker sites around the world since its introduction in October 2011.
SmartPulse data can be uploaded to a fab-wide fault detection and classification (FDC) system, which supports improved process control and excursion prevention, improving cycle time and lowering costs. SmartPulse also features new metrology to fully characterize light source performance in real time, enabling rapid troubleshooting and fast ramping of tools and fabs.
“With increasing wafer throughput and the high cost of excursions, the need for excursion prevention is a priority,” said Ed Brown, president and chief operating officer of Cymer. “SmartPulse’s unique capabilities support current production requirements and are extendible to address the increasingly challenging demands of the lithography roadmap.”
Available on Argon Fluoride (ArF) light sources, SmartPulse is part of Cymer’s OnPulse™ family of support products. SmartPulse reinforces Cymer’s commitment to supply customers with continuous value enhancements for new and previously installed light sources, building on the company’s deep technical expertise and worldwide installed base support infrastructure.
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